Megaturion™ Bulk Specialty Gas Systems
The Megaturion™ line of Bulk Specialty Gas Systems, by SEMI-GAS®, sets the standard for safe, precise, and pure distribution and delivery of bulk hazardous process gases.
Built for the high-volume handling and delivery of hazardous gases such as NH3, HCl, AsH3, and SiH4, Megaturion™ bulk specialty gas systems conform to the SEMI S2 standard and are renowned for their intuitive operating systems, enabling the highest level of precision and control as needed in ultra high purity production applications.
The control comes from the GigaGuard™ PLC-based, UL labeled technology that SEMI-GAS® systems are known for, which include touchscreen interfaces and LED displays for safe and continuous gas management.
Available in a variety of configurations to suit your bulk specialty gas process requirements, Megaturion™ systems are ideal for advanced production environments and high throughput demands.
Megaturion™ Line Design Standards
- Conforms to SEMI S2
- UL Labeled
- Conforms to Uniform Building and Fire Codes
- Upholds Sample Validation Testing Standards
- Equipped with GigaGuard™ Controller
- Helium Leak Tested to 1×10-9 atm-cm3/sec
SEMI-GAS® for Specialized UHP Demands
Our premier line of gas delivery systems, SEMI-GAS® is ideal for industries such as:
- Semiconductor
- Electronics
- Aerospace & Defense
- High-Tech Manufacturing
Explore our Megaturion™ Bulk Specialty Gas Systems Offerings
Looking to Order?
To order any of our Megaturion™ Bulk Specialty Gas Systems offerings, contact a SEMI-GAS® sales representative today.