Press Releases
November 16, 2012
SEMI-GAS® Offers Multi-Cylinder Gas System for Bulk Gas Delivery
Ideal for high-flow gas processes
Malvern, Pa. November 2012 – SEMI-GAS® Systems, a division of Applied Energy Systems, Inc, and a manufacturer of industry-leading ultra-high purity gas source and distribution systems, now offers a multi-cylinder bulk specialty gas system for high-flow gas processes. MegaCyl™, part of the Megaturion™ line of bulk gas source systems, is ideal for areas where logistics or local regulations preclude the use of bulk gas containers.
SEMI-GAS Systems’ MegaCyl utilizes 4 to 18 standard gas cylinders, or more, to create one consolidated bulk gas delivery system. The MegaCyl source system is designed to supply NH3, HCI, H2Se, and other hazardous process gases at flow rates up to 500 slpm. Optional manifold and cylinder heaters are incorporated to facilitate liquid to gas phase change and to sustain higher gas flow rates.
Jim Murphy, SEMI-GAS Systems division manager says, “MegaCyl is an excellent solution for our customers located in areas where logistics inhibit the purchase, transport or storage of tonner and other bulk gas cylinders. MegaCyl utilizes banks of standard sized gas cylinders to sustain our customers’ high flow rates, when larger bulk gas packages aren’t a viable option.”
MegaCyl safely dispenses high-flow hazardous process gases and completes purge routines automatically. Cylinder switchover is fully automatic as well. System conditions are continuously monitored and recorded on a detailed alarm log, through an ergonomically positioned color touch screen. Each gas cylinder is independently monitored, weighed and potentially shut-down.
Constructed of welded 11 gauge steel with heavy cast aluminum cylinder brackets; MegaCyl features self-closing, self-latching doors and ¼” thick windows as well as integrated UL approved fire sprinklers.
Overall dimensions of the system vary by customer specification. As with all SEMI-GAS systems, each is designed to be flexible with a wide array of features and options available to precisely meet customer needs.
Reader Service Inquiries: Megan Kasper; Applied Energy Systems; 180 Quaker Lane, Malvern, Pa. 19355; mkasper@semi-gas.com; 610-647-8744.
ABOUT APPLIED ENERGY SYSTEMS:
Applied Energy Systems, Inc. produces ultra-high purity gas handling and distribution equipment. In addition to its industry-leading SEMI-GAS® Systems division, Applied Energy Systems manufactures gas cabinets, gas manifolds, valve manifold boxes and custom gas equipment as well as provides precision welding services, high purity piping installations and field services for the semiconductor, pharmaceutical, biotechnology, aerospace, university, government and research and development markets.