The Megaturion™ line of Bulk Specialty Gas Systems, by SEMI-GAS®, set the standard for safe, precise, and pure distribution and delivery of bulk hazardous process gases.

Built for the high-volume handling and delivery of hazardous gases such as NH3, HCl, AsH3, and SiH4, Megaturion™ bulk specialty gas systems are SEMI S2 compliant and renowned for their intuitive operating systems, enabling the highest level of precision and control as needed in ultra high purity production applications.

The control comes from the GigaGuard™ PLC-based, UL labeled technology that SEMI-GAS® systems are known for, which include touchscreen interfaces and LED displays for safe and continuous gas management.

Available in a variety of configurations to suit your bulk specialty gas process requirements, Megaturion™ systems are ideal for advanced production environments and high throughput demands.