Single Stage, Tied Diaphragm Regulator

Low Flow – High Pressure
Ultra-High Purity Applications
Non-Corrosive Gases
Flow Rates: Standard to 30 slpm (1 scfm)

Body: SS 316L Secondary Remelt
Poppet, Nozzle, Diaphragm: SS 316L
Finish: Electropolished and Passivated
Seat: PCTFE
Surface Finish: 15 Ra avg

Source Pressure: Vacuum to 3500 psig (241 bar) inlet
Delivery Pressure: 2 to 100 psig (0.14 to 7 bar)
Proof Pressure: 150% of maximum rating
Burst Pressure: 400% of maximum rating

Inlet/Outlet Connectors: ¼ face seal
Bonnet Port: ⅛ inch NPT
Flow Coefficient: 0.09
Internal Volume: 0.51 in³ (8.4 cm³)
Operating Temperature: -40°F to + 160°F (-40°C to +71°C)
Surface Finish: 15 Ra avg
Inboard Leakage: 2×10^-10 sccs
Outboard Leakage: 2 x 10^-9 sccs He
Leakage Across Seat: 4 x 10^-8 sccs He
Supply Pressure Effect: 0.25 psig per 100 psig source pressure drop

5 Ports
Gauge Port Connections: ¼ inch face seal female
Inlet/Outlet Ports: ¼ inch face seal male