AES’ Custom Engineering Capabilities in Action:
Explore a Sampling of Our Applied Solutions

Custom gas source and distribution system that combines the functionality of multiple gas cabinets and valve manifold boxes into one dynamic system.

• Controls the supply of up to 10 process gases to one or multiple points of use, or tool chambers, from both internal and external source supplies, via a single user interface
• Perfectly suited for semiconductor process tool and research applications, by enabling the operator to quickly and easily switch between process gases for experimentation and recipe development
• Eliminates the need for multiple safety devices including gas, exhaust and fire detection units, as well as separate gas source and distribution system controllers
• Minimizes cost of ownership by reducing several utility requirements, such as exhaust, clean dry air, electricity and purge gas supply

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Mini gas enclosure that provides safe and continuous gas delivery from small process and purge gas cylinders.

• Compact form factor includes all the same operational and safety features required for two complete source systems, with four process and purge cylinders
• Ideal for low volume applications or where space is limited
• Includes two separate compartments, each designed for a process and a purge cylinder (also available in a single source design, with one empty compartment that is expandable for future applications)
• Equipped with adjustable steel shelves and cylinder straps as well as adjustable back mounted exhaust ducts

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Mobile analytical cart for analyzing impurities within a process gas line, featuring a flexible design that allows for customized instrumentation and data collection.

• Used to monitor and protect various critical downstream gas processes and tools
• Integrated automatic data logging controller collects and compiles analytical data from each analyzer
• Features lockable heavy duty steel casters for both stationary and mobile analytical monitoring
• Various analyzer configurations available to precisely tailor the system’s operational needs for each application

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Automatic gas sampling system that eliminates operator touch time while certifying cylinders of blended gas mixtures.

• Eliminates human error while sampling any gases that can be detected using a Fourier Transform Infrared (FTIR) analyzer
• Ideal for EPA protocol analysis and for gas suppliers and gas companies that make EPA approved blended mixtures
• Capable of comparative ratio analysis in parts per million (PPM) and parts per billion (PPB) of multiple gases, with reports and sample certificates generated automatically
• Designed to integrate seamlessly with an MKS MultiGas FTIR analyzer

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Custom gas source system that safely and continuously delivers low vapor pressure liquefied process gases in vapor phase.

• Accommodates low vapor pressure gases used in semiconductor, LED and solar cell production, as well as in R&D applications
• Available in one and two process cylinder models, each utilizing an intuitive GigaGuard™ PLC controller for easy system operation
• Features an integrated fully automatic multi-zone heat control package to guard against undesirable process gas liquefaction and to help sustain the system’s cylinder temperatures and flowrates
• Uses a simplified manifold design with lower loss components and a streamlined path layout to reduce costs and minimize system downtime

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